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3D IC The New Edge of design
Subhash Chandra
Student Member, IEEE
BIT Muzaffarnagar
U.P, India
csubhash07@gmail.com
Abstract- The unprecedented growth of the Information
technology firm is demanding Very Large Scale (VLSI)
circuit with increasing functionality and performance at
the min. cost and power dissipation. VLSI circuits are
aggressively scaled to meet this demand, which in turn
has some serious problem for the semiconductorfirm.
Additionally heterogeneous integration of different
technologies increasingly desirable, for which planer (2-
D) IC`s may not be suitable. 3-D ICs are an attractive chip
architecture that can alleviate the interconnect related
problems such as delay and power dissipation and can
also facilitate integration of heterogeneous technologies
in one chip (SoC). The multi-layer chip industry opens up
a whole new world of design. With the Introduction of 3-
D ICs, the world of chips may never look the same again
Keywords: SoC, VLSI, 2D IC, Heat energy
I.INTRODUCTION
There is a saying in real estate; when land get
expensive, multi-storied buildings are the alternative
solution. We have a similar situation in the chip
industry. For the past thirty years, chip designers
have considered whether building integrated circuits
multiple layers might create cheaper, more powerful
chips. Performance of deep-sub micrometer very
large scale integrated (VLSI)[1] circuits is being
increasingly dominated by the interconnects due to
increasing wire pitch and increasing die size.
Additionally, heterogeneous integration[2] of
different technologies on one single chip is becoming
increasingly desirable, for which planar (2-D) ICs[3]
may not be suitable. The three dimensional (3-D)
chip design strategy exploits the vertical dimension to
alleviate the interconnect related problems and to
facilitate heterogeneous integration of technologies to
realize system on a chip (SoC)[4] design. By simply
dividing a planar chip into separate blocks, each
occupying a separate physical level interconnected by
short and vertical interlayer interconnects
(VILICs)[5], significant improvement in performance
and reduction in wire-limited chip area can be
achieved. In the 3-Ddesign architecture, an entire
chip is divided into a number of blocks, and each
block is placed on a separate layer of Si that are
stacked on top of each other.
What is 3D-IC?
A chip in three-dimensional integrated circuit (3D-
IC) technology iscomposed of two or more layers of
active electronic components, integrated both
vertically and horizontally.
II.MOTIVATION FOR 3-D IC`s
Continuous scaling of VLSI circuits is reducing gate
delays butrapidly increasing interconnect delays. A
significant fraction of the total powerconsumption
can be due to the wiring network used for clock
distribution, whichis usually realized using long
global wires.Furthermore, increasing drive for the
integration of disparate signals(digital, analog, RF)
and technologies (SOI, SiGe, GaAs, and so on) is
introducing various SoC design concepts,for which
existing planner (2-D) ICdesign may not be suitable.
INTERCONNECT LIMITED VLSI
PERFORMANCE
In single Si layer (2-D) ICs, chip size is continuously
increasing despitereductions in feature size made
possible by advances in IC technology such
aslithography and etching. This is due to the ever
growing demand for functionalityand
highperformance, which causes increased complexity
of chip design,requiring more and more transistors to
be closely packed and connected. Smallfeature sizes
have dramatically improved device performance. The
impact of thisminiaturization on the performance of
interconnect wire, however, has been lesspositive.
Smaller wire cross sections, smaller wire pitch, and
longer line totraverse larger chips have increase the
resistance and capacitance of these lines,resulting in a
significant increase in signal propagation (RC) delay.
Asinterconnect scaling continues, RC delay is
increasingly becoming the dominantfactor
determining the performance of advanced IC’s.
PHYSICAL LIMITATIONS OF Cu
INTERCONNECTS
At 250 nm technology node, Cu with low-k dielectric
was introduced toalleviate the adverse effect of
increasing interconnect delay.However,below130nm
technology node, substantial interconnect delays
would result in spite ofintroducing these new
materials, which in turn will severely limit the chip
performance. Further reduction in interconnect delay
is not possible.This problem is especially acute for
global interconnects[6], which compriseabout 10% of
total wiring in current architectures. Therefore, it is
apparent thatmaterial limitations will ultimately limit
the performance improvement astechnology scales.
Also, the problem of long lossylines[7] cannot be
fixed bysimply widening the metal lines and by using
thicker interlayer dielectric, sincethis will leas to an
increase in the number of metal layers. This will
result in anincrease in complexity, reliability and
cost.
III. 3D ARCHITECTURE
Three-dimensional integration to create multilayer Si
ICs[8] is a concept that can significantly improve
interconnect performance ,increase transistor packing
density, and reduce chip area and power dissipation.
Additionally 3D ICs can be very effective large scale
on chip integration of different systems. In 3D design
architecture, and entire(2D) chips is divided into a
number of blocks is placed on separate layer of Si
that arestacked on top of each other. Each Si layer in
the 3D structure can have multiple layer of
interconnects(VILICs) and common global
interconnects.
IV.CHALLENGES FOR 3-D INTEGRATION
A) THERMAL ISSUES IN 3-D ICs
An extremely important issue in 3-D ICs is heat
dissipation. Thermal effect s are already known to
significantly impact interconnected/device reliability
and performance in high-performance 2-D ICs. The
problem isexpected to be exacerbated by the
reduction in chip size, assuming that samepower
generated in a 2-D chip will now be generated in a
smaller 3-D chip,resulting in a sharp increase in the
power and density Analysis of thermalproblems in 3-
D circuits is therefore necessary to comprehend the
limitations ofthis technology and also to evaluate the
thermal robustness of different 3-Dtechnology and
design options.It is well known that most of the heat
energy[9] in integrated circuits arisesdue to transistor
switching. This heat energy is typically conducted
through thesilicon substrate to the package and then
to the ambient by a heat sink .Withmulti layer device
designs, devices in the upper layer will also generate
asignificant fraction of the heat .Furthermore, all the
active layers will beinsulated from each other by
layers of dielectrics[10] (LTO, HSQ, polyamide, etc.)
which typically have much lower thermal
conductivity than Si .Hence ,the
heatdissipationissue can become even more acute
for 3-D ICs and can causedegradation in device
performance ,and reduction in chip reliability due
toincreased junction leakage, electro migration
failures ,and by accelerating otherfailure
mechanisms.
B) RELIABLITY ISSUES IN 3-D ICs
Three dimensional IC s will possibly introduce some
new reliabilityproblems. These reliability issues may
arise due to the electro thermal andthermo
mechanical effects between various active layers and
the interfacesbetween the active layers, which can
also influence existing IC reliability hazardssuch a
electro migration and chip performance.
Additionally, heterogeneousintegration of
technologies using 3-d architecture will increase the
need tounderstand mechanical and thermal behavior
of new material of new materialinterfaces and thin
film material thermal and mechanical properties.
V.AREA AND PERFORMANCE ESTIMATION
OF 3D ICs
Now we present a methodology that can be used to
provide an initialestimate of the area and
performance of high speed logic circuits fabricated
usingmultiple silicon layer IC technology. The
approach is based on the empiricalrelationship known
as Rent’s Rule [11].
Rent’s Rule:
It correlates the number of signal input and output
(I/O) pins T, to the number of gates N, in a random
logic network and is given by the following
expressions:
T=kNP -------------(i)
Here k & P denote the average number of fan out per
gate and the degree of wiring complexity (with P=1
representing the most complex wiring network),
respectively, and are empirically derived as constants
for a given generation of ICs.
ESTIMATING 2-D AND 3-D CHIP AREA
In integrated circuits that are wire-pitch limited in
size, the area require by the wiring network is
assumed to be much greater than the area required by
the logic gates. For the purpose of minimizing silicon
real estate and signal propagation delays, the wiring
network is segmented into separate tiers that
arephysically fabricated in multiple layers. An
interconnect tier is categorized by factors such as
metal line pitch andcross-section, maximum
allowable signal delay and communication mode
(suchas intra block, or inter block). A tier can have
more than one layer of metalinterconnects if
necessary, and each tier or layer is connected to the
rest of thewiring network and the logic gates by
vertical vias. The tier closest to the logicdevices
(referred to as the local tier) is normally for short
distance intra blockcommunications.Metal lines in
this tier will normally be the shortest. They will also
normally have the finest pitch. The tier furthest away
from the device layer(referred to as global tier) is
responsible for long distance across chip inter block
communications, clocking and power distribution.
Since this tier is populated bythe longest of wires, the
metal pitch is the largest to minimize signal
propagationdelays. A typical modern IC
interconnects architecture will define three
wiringtiers: local, semi-global, and global. The
semi-global tier is normallyresponsible for inter
block communications across intermediate distances.
The area of the chip is determined by the total wiring
requirement. Interms of gate pitch, the total area
required by the interconnect wiring can be expressed
as
Arequired=√Ac(PlocLtotal_loc+PsemiLtotal_semi+P
globLtotal_glob)/N
Where,
Ac- Chip area;
N- number of gates;
Ploc- local pitch;
Psemi- semi global pitch;
Pglobal- global pitch;
Ltotal_loc- total lengths of local interconnects;
Ltotal_semi- total length of semi global
interconnects;
Ltotal_glob- total length of global interconnects;
The total interconnects length for any tier can be
found by integrating thewire-length distribution
within the boundaries that define the tier. Hence if
follows that
Ltotal_loc= X ∫ li (l) dl
Ltotal_semi=X ∫ li (l) dl
Ltotal_glob = X ∫ li (l) dl
Where X is a correction factor that converts the point
–to – point interconnectlength to wiring net length
(using a linear net model, X=4/(f.o. + 3)
VI.ADVANTAGES OF 3D ARCHITECTURE
The 3D architecture offers extra flexibility in system
design, placementand routing. For instance, logic
gates on a critical path can be placed very closeto
each other using multiple active layers. This would
result in a significantreduction in RC delay and can
greatly enhance the performance of logicalcircuits.
The 3D chip design technology can be exploited to
build SoCs by placingcircuits with different voltage
and performance requirements in different
layers.
The 3D integration can reduce the wiring ,thereby
reducing thecapacitance, power dissipation and chip
area and therefore improve chip
performance.
Additionally the digital and analog components in
the mixed-signalsystems can be placed on different Si
layers thereby achieving better noiseperformance due
to lower electromagnetic interference between
suchcircuits blocks.
From an integration point of view, mixed-
technology assimilation couldbe made less complex
and more cost effective by fabricating
suchtechnologies on separate substrates followed by
physical bonding.
VII.APPLICATIONS
Portable electronic digital cameras, digital audio
players, PDAs, smartcellular phones, and handheld
gaming devices are among the fastest growing
technology market for both business and consumers.
To date, one of the largestconstraints to growth has
been affordable storage, creating the marketing
opportunity for ultra low cost internal and external
memory. These applicationsshare characters beyond
rapid market growth.Portable devices all require
small form factors, battery efficiency,robustness, and
reliability. Both the devices and consumable media
are extremelyprice sensitive with high volumes
coming only with the ability to hit low pricepoints.
Device designers often trade application richness to
meet tight costtargets. Existing mask ROM and
NAND flash non volatiletechnology[12]
forcedesigners and product planners to make the
difficult choice between low cost orfield
programmability and flexibility. Consumers value the
convenience and easeof views of readily available
low cost storage. The potential to dramaticallylower
the cost of digital storage weapons many more
markets than those listed
above. Manufacturers of memory driven devices can
now reach price pointspreviously inaccessible and
develop richer, easier to use products.
VIII.CONCLUSION
The 3 D memory will just the first of a new
generation of dense,inexpensive chips that promise to
make digital recording media both cheap and
convenient enough to replace the photographic film
and audio tape. We canunderstand that 3-D ICs are
an attractive chip architecture, that can alleviate the
interconnect related problems such as delay and
power dissipation and can alsofacilitate integration of
heterogeneous technologies in one chip. The
multilayerchip building technology opens up a whole
new world of design like a cityskyline transformed
by skyscrapers, the world of chips may never look at
thesame again.
REFERENCES
[1] Neil H. E Weste, David Harris, “CMOS VLSI
Design”
[2]Daniel Lu, C. P. Wong “Materials for
Advanced Packaging”, Page-5
[3]Guo Qi Zhang “More than moore: Creating high
value micro/nano electronic system”, page no-20,
1.2.6
[4]Micharl j.Dimario,
“system of system collabrarative formation” page no-
170
[5] Dissertation abstract international ,Stanford
university 2003(VILICs)
[6]Nadine Azémard, Johan Vounckx
“Integrated circuit and system design: Power and
timeing modeling”, page no-181
[7] Gianluca setti, Riccardo ravatti “Proceeding of
the IEEE workshop on Nonlinear dynamic of
electronic system” , page no-283
[8] Corl. Clarys, “ULSI process integration III:
Proceeding of the international symposium” ,
Electrochemical Society, page no-202
[9] Y. S. Touloukian, Thermophysical properties of
Matter, TPRC Data Series Vol. 1- 4
[10] deborah D.L chung “Material for electronic
packing”, page no-194
[11] Rao R Tummala ,Eugened j Rumazewski,
“Microelectronic packing handbook: Technologies
drivers”, pages- (1-22), part 1-2
[12] Giovanni campardo, David Novosel,
“VLSI design of non-volatile memories” ,page no-
xxiii

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3D ic the new edge of electronics

  • 1. 3D IC The New Edge of design Subhash Chandra Student Member, IEEE BIT Muzaffarnagar U.P, India csubhash07@gmail.com Abstract- The unprecedented growth of the Information technology firm is demanding Very Large Scale (VLSI) circuit with increasing functionality and performance at the min. cost and power dissipation. VLSI circuits are aggressively scaled to meet this demand, which in turn has some serious problem for the semiconductorfirm. Additionally heterogeneous integration of different technologies increasingly desirable, for which planer (2- D) IC`s may not be suitable. 3-D ICs are an attractive chip architecture that can alleviate the interconnect related problems such as delay and power dissipation and can also facilitate integration of heterogeneous technologies in one chip (SoC). The multi-layer chip industry opens up a whole new world of design. With the Introduction of 3- D ICs, the world of chips may never look the same again Keywords: SoC, VLSI, 2D IC, Heat energy I.INTRODUCTION There is a saying in real estate; when land get expensive, multi-storied buildings are the alternative solution. We have a similar situation in the chip industry. For the past thirty years, chip designers have considered whether building integrated circuits multiple layers might create cheaper, more powerful chips. Performance of deep-sub micrometer very large scale integrated (VLSI)[1] circuits is being increasingly dominated by the interconnects due to increasing wire pitch and increasing die size. Additionally, heterogeneous integration[2] of different technologies on one single chip is becoming increasingly desirable, for which planar (2-D) ICs[3] may not be suitable. The three dimensional (3-D) chip design strategy exploits the vertical dimension to alleviate the interconnect related problems and to facilitate heterogeneous integration of technologies to realize system on a chip (SoC)[4] design. By simply dividing a planar chip into separate blocks, each occupying a separate physical level interconnected by short and vertical interlayer interconnects (VILICs)[5], significant improvement in performance and reduction in wire-limited chip area can be achieved. In the 3-Ddesign architecture, an entire chip is divided into a number of blocks, and each block is placed on a separate layer of Si that are stacked on top of each other. What is 3D-IC? A chip in three-dimensional integrated circuit (3D- IC) technology iscomposed of two or more layers of active electronic components, integrated both vertically and horizontally. II.MOTIVATION FOR 3-D IC`s Continuous scaling of VLSI circuits is reducing gate delays butrapidly increasing interconnect delays. A significant fraction of the total powerconsumption can be due to the wiring network used for clock distribution, whichis usually realized using long global wires.Furthermore, increasing drive for the integration of disparate signals(digital, analog, RF) and technologies (SOI, SiGe, GaAs, and so on) is introducing various SoC design concepts,for which existing planner (2-D) ICdesign may not be suitable. INTERCONNECT LIMITED VLSI PERFORMANCE In single Si layer (2-D) ICs, chip size is continuously increasing despitereductions in feature size made possible by advances in IC technology such aslithography and etching. This is due to the ever growing demand for functionalityand highperformance, which causes increased complexity of chip design,requiring more and more transistors to be closely packed and connected. Smallfeature sizes have dramatically improved device performance. The impact of thisminiaturization on the performance of interconnect wire, however, has been lesspositive. Smaller wire cross sections, smaller wire pitch, and longer line totraverse larger chips have increase the resistance and capacitance of these lines,resulting in a significant increase in signal propagation (RC) delay. Asinterconnect scaling continues, RC delay is increasingly becoming the dominantfactor determining the performance of advanced IC’s. PHYSICAL LIMITATIONS OF Cu INTERCONNECTS
  • 2. At 250 nm technology node, Cu with low-k dielectric was introduced toalleviate the adverse effect of increasing interconnect delay.However,below130nm technology node, substantial interconnect delays would result in spite ofintroducing these new materials, which in turn will severely limit the chip performance. Further reduction in interconnect delay is not possible.This problem is especially acute for global interconnects[6], which compriseabout 10% of total wiring in current architectures. Therefore, it is apparent thatmaterial limitations will ultimately limit the performance improvement astechnology scales. Also, the problem of long lossylines[7] cannot be fixed bysimply widening the metal lines and by using thicker interlayer dielectric, sincethis will leas to an increase in the number of metal layers. This will result in anincrease in complexity, reliability and cost. III. 3D ARCHITECTURE Three-dimensional integration to create multilayer Si ICs[8] is a concept that can significantly improve interconnect performance ,increase transistor packing density, and reduce chip area and power dissipation. Additionally 3D ICs can be very effective large scale on chip integration of different systems. In 3D design architecture, and entire(2D) chips is divided into a number of blocks is placed on separate layer of Si that arestacked on top of each other. Each Si layer in the 3D structure can have multiple layer of interconnects(VILICs) and common global interconnects. IV.CHALLENGES FOR 3-D INTEGRATION A) THERMAL ISSUES IN 3-D ICs An extremely important issue in 3-D ICs is heat dissipation. Thermal effect s are already known to significantly impact interconnected/device reliability and performance in high-performance 2-D ICs. The problem isexpected to be exacerbated by the reduction in chip size, assuming that samepower generated in a 2-D chip will now be generated in a smaller 3-D chip,resulting in a sharp increase in the power and density Analysis of thermalproblems in 3- D circuits is therefore necessary to comprehend the limitations ofthis technology and also to evaluate the thermal robustness of different 3-Dtechnology and design options.It is well known that most of the heat energy[9] in integrated circuits arisesdue to transistor switching. This heat energy is typically conducted through thesilicon substrate to the package and then to the ambient by a heat sink .Withmulti layer device designs, devices in the upper layer will also generate asignificant fraction of the heat .Furthermore, all the active layers will beinsulated from each other by layers of dielectrics[10] (LTO, HSQ, polyamide, etc.) which typically have much lower thermal conductivity than Si .Hence ,the heatdissipationissue can become even more acute for 3-D ICs and can causedegradation in device performance ,and reduction in chip reliability due toincreased junction leakage, electro migration failures ,and by accelerating otherfailure mechanisms. B) RELIABLITY ISSUES IN 3-D ICs Three dimensional IC s will possibly introduce some new reliabilityproblems. These reliability issues may arise due to the electro thermal andthermo mechanical effects between various active layers and the interfacesbetween the active layers, which can also influence existing IC reliability hazardssuch a electro migration and chip performance. Additionally, heterogeneousintegration of technologies using 3-d architecture will increase the need tounderstand mechanical and thermal behavior of new material of new materialinterfaces and thin film material thermal and mechanical properties. V.AREA AND PERFORMANCE ESTIMATION OF 3D ICs Now we present a methodology that can be used to provide an initialestimate of the area and performance of high speed logic circuits fabricated usingmultiple silicon layer IC technology. The
  • 3. approach is based on the empiricalrelationship known as Rent’s Rule [11]. Rent’s Rule: It correlates the number of signal input and output (I/O) pins T, to the number of gates N, in a random logic network and is given by the following expressions: T=kNP -------------(i) Here k & P denote the average number of fan out per gate and the degree of wiring complexity (with P=1 representing the most complex wiring network), respectively, and are empirically derived as constants for a given generation of ICs. ESTIMATING 2-D AND 3-D CHIP AREA In integrated circuits that are wire-pitch limited in size, the area require by the wiring network is assumed to be much greater than the area required by the logic gates. For the purpose of minimizing silicon real estate and signal propagation delays, the wiring network is segmented into separate tiers that arephysically fabricated in multiple layers. An interconnect tier is categorized by factors such as metal line pitch andcross-section, maximum allowable signal delay and communication mode (suchas intra block, or inter block). A tier can have more than one layer of metalinterconnects if necessary, and each tier or layer is connected to the rest of thewiring network and the logic gates by vertical vias. The tier closest to the logicdevices (referred to as the local tier) is normally for short distance intra blockcommunications.Metal lines in this tier will normally be the shortest. They will also normally have the finest pitch. The tier furthest away from the device layer(referred to as global tier) is responsible for long distance across chip inter block communications, clocking and power distribution. Since this tier is populated bythe longest of wires, the metal pitch is the largest to minimize signal propagationdelays. A typical modern IC interconnects architecture will define three wiringtiers: local, semi-global, and global. The semi-global tier is normallyresponsible for inter block communications across intermediate distances. The area of the chip is determined by the total wiring requirement. Interms of gate pitch, the total area required by the interconnect wiring can be expressed as Arequired=√Ac(PlocLtotal_loc+PsemiLtotal_semi+P globLtotal_glob)/N Where, Ac- Chip area; N- number of gates; Ploc- local pitch; Psemi- semi global pitch; Pglobal- global pitch; Ltotal_loc- total lengths of local interconnects; Ltotal_semi- total length of semi global interconnects; Ltotal_glob- total length of global interconnects; The total interconnects length for any tier can be found by integrating thewire-length distribution within the boundaries that define the tier. Hence if follows that Ltotal_loc= X ∫ li (l) dl Ltotal_semi=X ∫ li (l) dl Ltotal_glob = X ∫ li (l) dl Where X is a correction factor that converts the point –to – point interconnectlength to wiring net length (using a linear net model, X=4/(f.o. + 3) VI.ADVANTAGES OF 3D ARCHITECTURE The 3D architecture offers extra flexibility in system design, placementand routing. For instance, logic gates on a critical path can be placed very closeto each other using multiple active layers. This would result in a significantreduction in RC delay and can greatly enhance the performance of logicalcircuits. The 3D chip design technology can be exploited to build SoCs by placingcircuits with different voltage and performance requirements in different layers. The 3D integration can reduce the wiring ,thereby reducing thecapacitance, power dissipation and chip area and therefore improve chip performance. Additionally the digital and analog components in the mixed-signalsystems can be placed on different Si layers thereby achieving better noiseperformance due to lower electromagnetic interference between suchcircuits blocks. From an integration point of view, mixed- technology assimilation couldbe made less complex and more cost effective by fabricating suchtechnologies on separate substrates followed by physical bonding. VII.APPLICATIONS
  • 4. Portable electronic digital cameras, digital audio players, PDAs, smartcellular phones, and handheld gaming devices are among the fastest growing technology market for both business and consumers. To date, one of the largestconstraints to growth has been affordable storage, creating the marketing opportunity for ultra low cost internal and external memory. These applicationsshare characters beyond rapid market growth.Portable devices all require small form factors, battery efficiency,robustness, and reliability. Both the devices and consumable media are extremelyprice sensitive with high volumes coming only with the ability to hit low pricepoints. Device designers often trade application richness to meet tight costtargets. Existing mask ROM and NAND flash non volatiletechnology[12] forcedesigners and product planners to make the difficult choice between low cost orfield programmability and flexibility. Consumers value the convenience and easeof views of readily available low cost storage. The potential to dramaticallylower the cost of digital storage weapons many more markets than those listed above. Manufacturers of memory driven devices can now reach price pointspreviously inaccessible and develop richer, easier to use products. VIII.CONCLUSION The 3 D memory will just the first of a new generation of dense,inexpensive chips that promise to make digital recording media both cheap and convenient enough to replace the photographic film and audio tape. We canunderstand that 3-D ICs are an attractive chip architecture, that can alleviate the interconnect related problems such as delay and power dissipation and can alsofacilitate integration of heterogeneous technologies in one chip. The multilayerchip building technology opens up a whole new world of design like a cityskyline transformed by skyscrapers, the world of chips may never look at thesame again. REFERENCES [1] Neil H. E Weste, David Harris, “CMOS VLSI Design” [2]Daniel Lu, C. P. Wong “Materials for Advanced Packaging”, Page-5 [3]Guo Qi Zhang “More than moore: Creating high value micro/nano electronic system”, page no-20, 1.2.6 [4]Micharl j.Dimario, “system of system collabrarative formation” page no- 170 [5] Dissertation abstract international ,Stanford university 2003(VILICs) [6]Nadine Azémard, Johan Vounckx “Integrated circuit and system design: Power and timeing modeling”, page no-181 [7] Gianluca setti, Riccardo ravatti “Proceeding of the IEEE workshop on Nonlinear dynamic of electronic system” , page no-283 [8] Corl. Clarys, “ULSI process integration III: Proceeding of the international symposium” , Electrochemical Society, page no-202 [9] Y. S. Touloukian, Thermophysical properties of Matter, TPRC Data Series Vol. 1- 4 [10] deborah D.L chung “Material for electronic packing”, page no-194 [11] Rao R Tummala ,Eugened j Rumazewski, “Microelectronic packing handbook: Technologies drivers”, pages- (1-22), part 1-2 [12] Giovanni campardo, David Novosel, “VLSI design of non-volatile memories” ,page no- xxiii
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